11th Frontiers in Low Temperature Plasma Diagnostics
24-28 May 2015 IGESA, Porquerolles Island, Hyères, Var (France)
Spectroscopic studies of MW plasma containing HMDSO, O2 and N2
Andy Nave  1, *, @  , Felix Mitschker  2, @  , Peter Awakowicz  2, @  , Jürgen Röpcke  1, @  
1 : INP Greifswald
Felix-Hausdorff-Straße 2, 17489, Greifswald -  Germany
2 : Rühr-bochum university
Allgemeine Elektrotechnik und Plasmatechnik, 44780 Bochum -  Germany
* : Corresponding author
Subject : : Oral presentation
Topics : Poster
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