11th Frontiers in Low Temperature Plasma Diagnostics
24-28 May 2015 IGESA, Porquerolles Island, Hyères, Var (France)
Optical emission spectroscopy in a VHF-CCP: Influence of a polymeric discharge chamber
Marcel Fiebrandt, Katharina Stapelmann, Nikita Bibinov  1, @  , Peter Awakowicz  1, @  
1 : Institute for Electrical Engineering and Plasma Technology, Ruhr-University Bochum  (AEPT)
Universitätsstraße 150 44801 Bochum -  Germany
Subject : : Oral presentation
Topics : Poster
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