FLTPD-XI
11th Frontiers in Low Temperature Plasma Diagnostics
24-28 May 2015 IGESA, Porquerolles Island, Hyères, Var (France)
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sciencesconf.org:fltpd-xi:61587
Temporal evolution of plasma density in a pulsed 2-frequency (2/13.56MHz) 2-antenna inductively coupled plasma discharge
Nishant Sirse
1,
@
,
Geun Young Yeom
2
,
Bert Ellingboe
1,
@
1 :
Dublin City University (DCU) -
Website
Dublin, 9 Ireland - Ireland
2 :
Sungkyunkwan University (Sungkyunkwan University) -
Website
Natural Science Campus 2066, Seobu-Ro Jangan-Gu Suwon-Si Gyeong Gi-Do - South Korea
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