FLTPD-XI
11th Frontiers in Low Temperature Plasma Diagnostics
24-28 May 2015 IGESA, Porquerolles Island, Hyères, Var (France)
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sciencesconf.org:fltpd-xi:61620
Optical and probe diagnostics of a 2.45 GHz ECR coaxial plasma source
Juslan Lo
1, *,
@
,
Louis Latrasse
2, *,
@
,
Bruno Caillier
1,
@
,
Philippe Guillot
1,
@
1 :
Equipe de Recherche Diagnostic des Plasmas Hors Equilibre (DPHE) -
Website
CUFR Jean François Champollion
CUFR Jean François Champollion Place de Verdun 81012 Albi - France
2 :
SAIREM -
Website
SAIREM
12 porte du Grand Lyon, 01702 Neyron - France
* :
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:
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